Laser CVD.

نویسندگان

چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Laser Micro-Raman Spectroscopy of CVD Nanocrystalline Diamond Thin Film

Laser micro-Raman spectroscopy is an ideal tool for assessment and characterization of various types of carbon-based materials. Due to its special optical properties (CrN) coated stainless steel substrates. NCD films have been investigated by laser micro-Raman spectroscopy. The fingerprint of diamond based materials is in the spectral region of 1000-1600 cm-1 in the first order of Raman scatter...

متن کامل

Growth of Silicon Nanowires by Laser-assisted Cvd of Silane

The low-dimensional electron confinement effects in nanostructures is one of motivation for development of new research areas in growth technologies and materials engineering. To test this fundamental concept, one-dimentional nanostructures, such as nanotubes and nanowires stay good candidates. Thus nanoelectronics is certainly now the branch with the most significant commercial impact as predi...

متن کامل

Laser-CVD 3D Rapid Prototyping of Laser Driven Moveable Micro-Objects

Using continuous wave visible (514 nm, 488 nm) laser beams and the gaseous precurcsors lrimethylamine alane (CH3)3NAIH3 and oxygen, free-standing three-dimensional (3D) A1203 ceramic microstructures can be directly written under software control. By suitableIaser irradiation, parts of these 3D microobjectscanbe moved through thermal expansion forces. This is a f i s t step towards laser rapid p...

متن کامل

Low-pressure CVD and Plasma- Enhanced CVD

LPCVD is a process used in the manufacturing of the deposition of thin films on semiconductors usually ranging from a few nanometers to many micrometers. LPCVD is used to deposit a wide range of possible film compositions with good conformal step coverage. These films include a variety of materials including polysilicon for gate contacts, thick oxides used for isolation, doped oxides for global...

متن کامل

Ae Monitoring from Cvd-diamond Film Subjected to Micro-indentation and Pulse Laser Spallation

We monitored AEs during micro-indentation and pulse laser spallation test of CVD diamond film deposited on sintered SiC, and classified the fracture type by Lamb wave AE analysis. In the indentation test with a Rockwell sphere indenter, we observed Hertz ring cracks and simultaneously detected AEs from Mode-I fracture. Crack types were classified from polarity distribution of the first arrival ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: The Review of Laser Engineering

سال: 1988

ISSN: 0387-0200,1349-6603

DOI: 10.2184/lsj.16.486